Multi-cathode DP 850

Alliance Concept – DP 850 : from research to industry…

DP850 system is oriented towards production tasks. With a source configuration with up to 6 x 200 mm magnetron cathodes, it enables the manufacturing of complex multilayers in automatic mode.

The load lock optimizes time cycle and quality of the deposited films.

As a matter of fact, we have also made a few of these DP850 systems with their 850 mm vacuum chamber diameter for research applications that require a source configuration with more than 10 x 2’’ cathodes.



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