EVA 760

Thanks to its large volume, the EVA760 system can be set up using awide range of complex configurations.
This configurable equipment as well as all the others products of the range, can handle a large number of substrates per run.

Its generously sized pumping system ensures a high throughput.

Combined optical and mechanical (quartz) thickness measurement, ion assisted deposition (IAD), co-evaporation, partial pressures regulation through RGA, glow discharge… are some of the great features that can be integrated into your system.


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