Ultimate tool for the synthesis of thin films, CT200 is the latest tool designed by our engineering department. It presents and highlights our know-how accumulated over 20 years.
Versatile and scalable equipment by definition, the heart of the tool is a central transfer chamber equipped with a dedicated vacuum robot. This chamber is the link between each process module connected through SEMI valve. Our decision to develop our own solution is a plain success.
- Load lock introduction (SEMI or dedicated cassette);
- Dry etching system (RIE);
- Planar deposition chamber;
- Convergent-deposition chamber;
- E-beam gun module (up configuration system);
In up configuration, it is possible to work with vacuum evaporation modules with eletron beam, for example.
Summed up in two words :
- Reduced maintenance.
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